Resonance experiments on microstructures
نویسنده
چکیده
Using piezoelectric excitation, the resonance frequencies of microstructures made of monocrystalline silicon or metal alloys are experimentally determined. Several resonance frequencies are found for each microstructure. A scanning vibrometer allows to determine the corresponding modal shape for frequencies lying between 40 Hz and 160 kHz. In combination with a numerical analysis, this data allows the determination of elastic moduli of orthotropic materials. An error analysis shows where the main difficulties arise when dealing with resonant behaviour of microstructures.
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